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Matthew A Hopcroft
Matthew A Hopcroft
George Washington, Cambridge, Stanford, Berkeley, Hewlett-Packard
Verified email at mems.stanford.edu
Title
Cited by
Cited by
Year
What is the Young's Modulus of Silicon?
MA Hopcroft, WD Nix, TW Kenny
Journal of microelectromechanical systems 19 (2), 229-238, 2010
23822010
Temperature dependence of quality factor in MEMS resonators
B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ...
Journal of Microelectromechanical systems 17 (3), 755-766, 2008
3302008
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators
RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ...
Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006
2502006
Temperature-insensitive composite micromechanical resonators
R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ...
Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009
2022009
Temperature-compensated aluminum nitride Lamb wave resonators
CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2010
1982010
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators
B Kim, RN Candler, MA Hopcroft, M Agarwal, WT Park, TW Kenny
Sensors and Actuators A: Physical 136 (1), 125-131, 2007
1862007
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams
RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ...
Journal of Microelectromechanical Systems 15 (4), 927-934, 2006
1752006
Micromechanical testing of SU‐8 cantilevers
M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, D Moore, J Brugger
Fatigue & Fracture of Engineering Materials & Structures 28 (8), 735-742, 2005
1682005
Micromechanical Testing of SU-8 Cantilevers
M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, DF Moore, J Brugger
Abstracts of ATEM: International Conference on Advanced Technology in …, 2003
1682003
Temperature-compensated high-stability silicon resonators
R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ...
Applied physics letters 90 (24), 2007
1502007
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano
Applied Physics Letters 97 (8), 2010
1422010
Thermal isolation of encapsulated MEMS resonators
CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ...
Journal of Microelectromechanical Systems 17 (1), 175-184, 2008
1002008
AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices
CM Lin, WC Lien, VV Felmetsger, MA Hopcroft, DG Senesky, AP Pisano
Applied Physics Letters 97 (14), 2010
942010
Using the temperature dependence of resonator quality factor as a thermometer
MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ...
Applied physics letters 91 (1), 2007
922007
Effects of stress on the temperature coefficient of frequency in double clamped resonators
R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ...
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
912005
Optimal drive condition for nonlinearity reduction in electrostatic microresonators
M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ...
Applied physics letters 89 (21), 2006
882006
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy
CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
742007
Frequency stability of wafer-scale encapsulated MEMS resonators
B Kim, RN Candler, M Hopcroft, M Agarwal, WT Park, TW Kenny
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
702005
A study of electrostatic force nonlinearities in resonant microstructures
M Agarwal, SA Chandorkar, H Mehta, RN Candler, B Kim, MA Hopcroft, ...
Applied Physics Letters 92 (10), 2008
622008
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators
M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ...
Journal of Applied Physics 102 (7), 2007
622007
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